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Technical Reference

Laser techniques Patent portfolio Technical papers

Patents

US Patent Other Patent Title
Pending   A system for probing a DUT comprising a tunable or CW laser source, and a modulator for modulating the output of the laser source.
Pending   Contactless measurements of voltage characteristics of dynamic electrical signals in integrated circuits
Pending   Hard-docking of a tester head to a DUT, while permitting the angular alignment of a specimen to be inspected to the optical axis of an optical testing tool
Pending   Probe-less non-invasive detection of electrical signals from integrated circuit devices
Pending   Image to image alignment using oversampled cross correlation
Pending   Discrimination between photons emitted by transistors and photons emitted by background sources
7,327,452   Light Beam Apparatus and Method for Orthogonal Alignment of Specimen
7,323,862   Apparatus and Method for Detecting Photon Emissions from Transistors
7,314,767   Method for Local Wafer Thinning and Reinforcement
7,297,948   Column Simultaneously Focusing a Particle Beam and an Optical Beam
7,257,507   System and Method for Determining Probing Locations on IC
7,245,133   Integration of Photon Emission Microscope and Focus Ion Beam
7,243,039   System and Method for Determining Probing Locations on IC
7,230,240   Enhanced Scanning Control of Charged Particle Beam Systems
7,228,464   PICA System Timing Measurement & Calibration
7,227,702   Bi-Convex Solid Immersion Lens
7,227,580   Knife Edge Tracking System and Method
7,224,828 Taiwan I256097 Time Resolved Non-Invasive Diagnostics System
7,115,426   Method and Apparatus for Addressing Thickness Variations of a Trench Floor Formed in a Semiconductor Substrate
7,135,678   Charged Particle Guide
7,135,123   Method and System for Integrated Circuit Backside Navigation
7,123,035   Optics Landing System and Method Therefor
7,113,630   PICA System Detector Calibration
7,102,374   Spray Cooling Thermal Management System and Method for Semiconductor Probing, Diagnostics, and Failure Analysis
7,060,196   FIB Milling of Copper over Organic Dielectrics
7,049,593 France 2812455 Superconducting Single Photon Detector
7,045,791 Germany 345871 France 2806527 Taiwan NI-203223 Column Simultaneously Focusing a Particle Beam and an Optical Beam
7,042,647   Scanning Optical System
7,042,563   Optical Coupling for Testing Integrated Circuits
7,038,442   Apparatus and Method for Detecting Photon Emissions from Transistors
7,036,109   Imaging Integrated Circuits with Focused Ion Beam
7,012,537   Beacon Circuit for Photo Emission Voltage Analysis
7,009,173   Lens Mount Integrated with a Thermoelectrically Cooled Photodetector Module
6,985,219   Optical Coupling for Testing Integrated Circuits
6,976,234   Apparatus & Method for Measuring Characteristics of Dynamic Electrical Signals in Integrated Circuits
6,967,491   Spatial and Temporal Selective Laser Assisted Fault Localization
6,961,672   Universal Diagnostic Platform for Specimen Analysis
6,958,248   Method and Apparatus for the Improvement of Material/Voltage Contrast
6,956,365   System and Method for Calibration of Testing Equipment using Device Photoemission
6,955,930   Method and Apparatus for Determining Thickness of a Semiconductor Substrate at the Floor of a Trench
6,943,572   Apparatus and Method for Detecting Photon Emissions from Transistors
6,939,209   Method for Backside Die Thinning and Polishing of Packaged Integrated Circuits
6,905,623   Precise, In-situ Endpoint Detection for Charged Particle Beam
6,891,363   Apparatus and Method for Detecting Photon Emissions from Transistors
6,872,581   Measuring Back-Side Voltage of an Integrated Circuit
6,859,031 Korea 734186 Taiwan 1264791 Apparatus and Method for Dynamic Diagnostic Testing of Integrated Circuits
6,855,622   Method and Apparatus for Forming a Trench Through a Semiconductor Substrate
6,853,941   Open-Loop for Waveform Acquisition
6,848,087   Sub-Resolution Alignment of Images
6,836,131 Taiwan I 251067 Spray Cooling and Transparent Cooling Plate Thermal Management System
6,828,811   Optics Landing System and Method Therefor
6,825,978 Singapore 106891 Korea 433311 High Sensitivity Thermal Radiation Detection with an Emission Microscope with Room Temperature Optics
6,824,655   Process for Charged Particle Beam Micro-Machining of Copper
6,819,117   PICA System Timing Measurement & Calibration
6,812,464 Taiwan 166651 Superconducting Single Photon Detector
6,797,581   Avalanche Photo Diode for Photon Counting Applications and Method Thereof
6,781,218   Method and Apparatus for Accessing Internal Nodes of an Integrated Circuit Using IC Package Substrate
6,778,327 Taiwan I 249622 Bi-Convex Solid Immersion Lens
6,744,267 Singapore 108393 Test System and Methodology
6,737,853   Photoconductive-Sampling Voltage Measurement
6,731,327   Dynamic Structural Coupling Mechanism for Reducing Optical Degradation in Vibrating Environments
6,720,588 Taiwan 201324 Avalanche Photo Diode for Photon Counting Applications
6,672,947   Method for Global Die Thinning and Polishing of Flip-Chip Packaged Integrated Circuits
6,630,667 Taiwan 159509 Compact, High Collection Efficiency Scintillator for Secondary Electron Detection
6,621,275   Time Resolved Non-Invasive Diagnostics System
6,594,086 EPC 1466194 Bi-Convex Solid Immersion Lens
6,518,571   Through the Substrate Investigation of Flip-Chip ICs
6,501,288 Taiwan 197139 On-Chip Optically Triggered Latch for IC Time Measurements
6,496,261 Taiwan 194194 Double-Pulsed Optical Interferometer for Waveform Probing of Integrated Circuits
6,462,814 Taiwan 161277 Beam Delivery and Imaging for Optical Probing of a Device Operating under Electrical Test
6,410,924   Energy Filtered Focused Ion Beam Column
6,252,222 Taiwan 170491 Differential Pulsed Laser Beam Probing of Integrated Circuits
6,225,626   Through the Substrate Investigation of Flip-Chip ICs
6,081,110 Korea 0628445 Thermal Isolation Plate for Probe Card
5,920,073   Optical System with an Axially Moveable Apertured Plate
5,905,577   Dual-Laser Voltage Probing of ICs
5,905,266 Taiwan NI-121589 Charged Particle Beam System with Optical Microscope
5,840,630 Germany 69703611.1 Korea 10-510431 Taiwan NI-109360 FIB Etching Enhanced with 1,2 Di-Iodo-Ethane
5,821,549   Through the Substrate Investigation of Flip-Chip ICs
5,747,818 France 0838836 Germany 69724549.7 Thermoelectric Cooling Gas-Assisted FIB System
5,731,984   Vector-Based Waveform Acquisition and Display
5,700,526   Insulator Deposition Using Focused Ion Beam
5,698,474   High Speed Diamond-Based Machining of Silicon Semiconductor Die in Wafer and Packaged Form for a Backside Emission Microscope Detection
5,675,499   Method of Probing a Net of an IC at an Optimal Probe-Point
5,638,005   Predictive Waveform Acquisition
5,616,921   Self-Masking FIB Milling
5,604,819   Determining Offset between Images of an IC
5,530,372   Method of Probing a Net of an IC at an Optimal Probe-Point
5,475,316   Transportable Image Emission Microscope
5,401,972   Layout Overlay for FIB Operations (Includes electronic beam deflection)
  Japan 3633993 Optimal Probe Point Placement
5,392,222   Locating a Field of View in which Selected IC Conductors are Unobscured
5,357,116   Focused ION Beam Processing with Charge Control
5,210,487   Double-Gated Integrating Scheme for Electron Beam Tester
5,282,088   Aplanatic Microlens and Method for Making Same
5,270,643   Pulsed Laser Photoemission Electron-Beam Probe
5,144,225   Methods and Apparatus for Acquiring Data from Intermittently Failing Circuits
5,127,064   High Resolution Image Compression Methods and Apparatus
5,054,097   Methods and Apparatus for Alignment of Images
4,912,405   Magnetic Lens and Electron Beam Deflection System
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