The DCG Systems dProber is a standard system mounted on a custom door designed to replace the door of the customer’s Scanning Electron Microscope (SEM) or Focused Ion Beam (FIB) System.
Electrical characterization for device quality and failure analysis
6 and 4-point probing
Butterfly curves
Kelvin probing
Contact-level probing
Metal 1-level probing
Temperature characterization option
EBIC/EBAC characterization option
CV characterization option
The dProber is comprised of a state-of-the-art six positioner Nanomanipulator and XYZ sample stage, a parametric analyzer, an advanced anti-contamination system, an industrial grade load lock, and custom software to control and integrate each component.
The dProber incorporates a load lock which allows the DUT to be moved into and out of the system vacuum chamber, and is designed for quick transfer of samples in an ultra-clean environment. The load lock is mounted on a custom-designed DCG door which replaces the standard door of the SEM or FIB system. Our most advanced anti-contamination system rigorously cleans the SEM/FIB, enabling the user to achieve superior ohmic contact.
