Nanomanipulators & Probers A suite of nanoprobing characterization tools for the semiconductor industry and advanced research markets, including 4, 6, and 8 probe systems.
nProberTM An eight-positioner nanomanipulator system designed and optimized to electrically probe sub-100nm features on semiconductor devices. The system consists of a state-of-the-art DCG Nanomanipulator, a high resolution, low kV SEM, a parametric analyzer, an advanced anti-contamination system, and custom software to control and integrate each component.
dProberTM A six-positioner, door-mountable solution for the semiconductor failure analysis industry. The System consists of a state-of-the-art DCG Nanomanipulator and XYZ sample stage, a parametric analyzer, an advanced anti-contamination system, an industrial grade load lock, and custom software to control and integrate each component.
sProberTM A four probe system uniquely designed for the customer’s existing SEM or FIB System. The user can easily install and remove the system. The system consists of a state-of-the-art DCG Nanomanipulator and sample stage, a parametric analyzer, an advanced anti-contamination system, and custom software to control and integrate each component.
Application Packages Enhanced functionality for nanoInstruments Systems, including Temperature and Low Noise Characterization, Image Capture, and E-Beam Current Analysis.
nanoInstrument Probes High aspect ratio probes with a small tip radius for probing the most advanced technology node devices.
