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Nanomanipulators & Probers
A suite of nanoprobing characterization tools for the semiconductor industry and advanced research markets, including 4, 6, and 8 probe systems. |
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nProberTM
An eight-positioner nanomanipulator system designed and optimized to electrically probe sub-100nm features on semiconductor devices. The system consists of a state-of-the-art Zyvex Nanomanipulator, a high resolution, low kV SEM, a parametric analyzer, an advanced anti-contamination system, and custom software to control and integrate each component. |
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dProberTM
A six-positioner, door-mountable solution for the semiconductor failure analysis industry. The System consists of a state-of-the-art Zyvex Nanomanipulator and XYZ sample stage, a parametric analyzer, an advanced anti-contamination system, an industrial grade load lock, and custom software to control and integrate each component. |
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sProberTM
A four probe system uniquely designed for the customer’s existing SEM or FIB System. The user can easily install and remove the system. The System consists of a state-of-the-art Zyvex Nanomanipulator and sample stage, a parametric analyzer, an advanced anti-contamination system, and custom software to control and integrate each component. |
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s200
A four-probe manipulation and testing tool used with a scanning electron microscope (SEM) for micro- and nanoscale research, development, and production applications. |
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Application Packages
Enhanced functionality for nanoInstruments Systems, including Temperature and Low Noise Characterization, Image Capture, and E-Beam Current Analysis. |
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NanoEffector® Probes
High aspect ratio probes for small features
(50nm contact) and active micromachined silicon structures with up to 50 µm of tip actuation. |
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