DCG Systems - Meridian

Spatial Fault and Defect Localization

The Meridian-IV is a fully integrated, performance-driven electrical failure analysis platform providing industry-leading sensitivity for fault and defect localization. Meridian-IV is the preferred choice for developers of advanced, low-voltage, high-density semiconductor devices requiring best-in-class performance and the ability to diagnose wide ranging failure modes, including parametric failures and those resulting from design-process marginalities.

Analytical capability for 45 nm and beyond
Best-in-class InGaAs-based emission detection
Patented, industry-proven "Point & Click" Solid Immersion Lens (SIL)
Inverted platform for easy ATE direct docking
Optional Laser Scanning Microscope (LSM) for static and dynamic analysis

Works easily with packaged parts and wafer/die backside samples
NEXS software integration for emission site analysis
Optional 175x Long Working Distance SIL (LWD-SIL)
Optional High performance L256 InGaAs camera
Optional High performance L1K InGaAs camera
Optional CCD camera

Parametric defects are uncovered only when the failing device is operated under a specific set of operations parameters - typically a combination of voltage, clock speed, and temperature. Implementing strong detection technology coupled with a set of advanced analytical methodologies allows for the introduction of new, dynamic applications such as Logic State Mapping (LoSM) and Dynamic Laser Stimulation (DLS). Meridian facilitates the development of the most advanced dynamic applications and techniques while maintaining the capability to isolate static faults.
	Photon Emission Microscopy (PEM) on the Meridian platform is based on an optimized combination of a high sensitivity short-wave infrared (SWIR) InGaAs camera and high numerical aperture (NA) aberration corrected optics. This combination provides high resolution through-silicon imaging and low-signal photon detection over the 0.9 to 1.6um spectral range, a capability particularly useful for backside device analysis. This optimized low-noise, high-sensitivity configuration enables emission acquisitions with unmatched signal-to-noise ratios resulting in rapid, transistor-level fault detection, even on sub-1 volt devices.
Meridian failure analysis platform is controlled by the mature, Windows-based BEAMS user environment and analysis software package. This well thought out and feature-rich environment has been continually improved upon over the last 20 years, providing superior fault localization and analysis capabilities. The BEAMS software, when used with Meridian-IV's improved optics, facilitates the device analysis by providing features such as the image mosaic, which allows multiple high magnification images to be "tiled" together to form a complete image
	The Laser Scanning Microscope (LSM) option transforms the Meridian into a high-resolution, high-contrast confocal laser scanning system optimized for both static and dynamic failure analysis. Static Laser Stimulation (SLS) applications such as OBIRCH, OBIC, and Seebeck Effect Imaging (SEI) identify the sources of shorts and resistive defects, providing the perfect complement to emission-based techniques.

High quality, high magnification image mosaics are easily obtained using the Meridian-IV. Individual high magnification images are acquired and then seamlessly integrated to form a complete mosaic of the device.

Options

Laser Voltage Imaging

Laser Voltage Imaging (LVI), shows the physical locations of transistors that are active at a specific frequency on the Meridian-IV.

CW Laser Voltage Probing

Continuous Wave Laser Voltage Probing (CW-LVP) acquires functional waveform data on the Meridian-IV.

NEXS Software for Electrical Failure Analysis

NEXS provides CAD navigation for the physical device, and cross-maps emission locations to the CAD layout and circuit schematic. Optional NEXS Layout configurations read either GDS or Knights mask database formats.

Content on this page requires a newer version of Adobe Flash Player.

Content on this page requires a newer version of Adobe Flash Player.