DCG Systems - NanoEffector

Temperature Characterization

The Temperature Characterization Package is the complete solution for thermal probing in an SEM. The package includes a hot/cold sample stage, a temperature controller which is integrated with and easily controlled by the main software interface, a feedthrough flange designed for the SEM, as well as all required electrical and mechanical connections. The hot/cold sample mounts on the X, Y, Z stage in the dProber and nProber.

Specifications

Low Temp: -20C
High Temp: 120C
Temp. Resolution: 0.01C
Temp. Accuracy: Better than 2C
Temp. Stability: 0.1C
Heating Ramp rate:
Variable – Less than 10 minutes from 20C to 120C
Cooling ramp rate:
Variable – Less than 10 minutes from 20C to -20C
Sample Size: 12mm X 12mm X 3mm
Heat transfer gas used: Nitrogen
Document: PKG1-ZZDS-001b

E-Beam Current Analysis

This package is the complete solution for Electron Beam Induced Current (EBIC) and Electron Beam Absorbed Current (EBAC) characterization. A host of failures in today’s devices can be attributed to mismatched doping concentrations, misplaced dopants, opens, and shorts. These failure mechanisms can be located and characterized using the E-Beam Current (EBC) Analysis Package. The package consists of a two stage ultra high gain amplification system, an E-Beam scan control system, cables, and interface hardware (for your specific SEM), and a software interface to contol it all.

The included E-Beam scan control system allows for ultimate flexibility in digital E-Beam control. A dual input feature allows the EBIC/EBAC signal and another imaging signal, such as a secondary electron detector, to be acquired and displayed simultaneously. The user is able to collect ultra-high resolution images through the scan control system for further image processing.

Both a real time and post processing digital zoom function allows increased magnification without altering SEM magnification. Post acquisition line profiles can be extracted from maps for advanced analysis with a choice of multiple autoscaling routines, a histogram tool, and user defined or predefined intensity look-up tables. Post image processing capability also includes false colorization and image overlay, as well as, a wide range of mathematical functions which can be applied to the images and data set.

For technical details regarding the implementation of EBIC and EBAC see: Electron-beam Current Analysis Techniques.