DCG Systems - P3X-IV

The Complete NanoProbing Solution

The DCG Systems nProber, flagship product in the nanoInstruments product line, is designed and optimized to electrically probe sub-100nm features on semiconductor devices with superior ease-of-use and throughput.

Electrical characterization for device quality and failure analysis for die, wafer pieces and packaged parts
8, 6 and 4-point probing
Butterfly curves
Kelvin probing
Bitcell stability testing

Contact-level probing
Metal 1-level probing
Open via analysis
Temperature characterization option
EBIC/EBAC characterization option
CV characterization option
Pulsing IV characterization

The nProber is comprised of a state-of-the-art nanomanipulator integrated into a high resolution and highly accurate low keV SEM, capable of sub-500 eV imaging at low beam currents. Data acquired via the probes is interpreted using an industry standard parametric analyzer.
	The nProber employs a semi-automated process flow for higher throughput and ease-of-use. Eight encoded positioners may be placed with 2 nm resolution probe steps. The XYZ encoded center stage provides step and repeat capability, while allowing the probes to remain in registration while the sample is moved to the next bit, making the nProber ideal for probing repetitive structures on a device-under-test (DUT).
The nProber also provides feedback capability for precise “Point & Click” positioning of the probes and the XY sample stage. This can be combined with a CAD Navigation software suite to quickly locate and move to the area of interest. When used with CAD navigation, the stage movement accuracy is within 50 nm. The DataViewer software displays transistor characteristics in an easy-to-understand format.
	The nProber incorporates a unique advanced anti-contamination system, the Optimizer® (US Patent 5,510,624), which automatically and rigorously cleans the SEM chamber and the probe tips, thus enabling the system to achieve low noise measurements with better than 200 fA accuracy. An easy-to-use Windows based software platform seamlessly integrates all components of the nProber. The Field Emission Scanning Electron Microscope (FE SEM) provides the optimal beam shift resolution, video rates, vacuum technology, and user control required for IC nanoprobing. The nProber’s electrical characterization system is specifically designed for low-noise measurements.

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