DCG Systems

Next generation back-side laser voltage probing

Fast and clean acquisition of sub-volt waveforms from 32 nm technology is critical in the performance of a timely analysis. The Ruby laser voltage prober is a dynamic waveform acquisition and analysis instrument which provides leading-edge analytical capability for sub-volt devices. Utilizing a focused infrared laser and solid immersion lens (SIL), Ruby can probe through the silicon device substrate and measure waveforms from active device transistors on flip-chip devices.

The Ruby is built upon the mature , reliable EmiScope architecture and leverages a new laser voltage probing acquisition scheme Polarization Difference Probing (PDP). Ruby couples ease-of-use with unprecedented low-voltage sensitivity and waveform timing accuracy.

Node-level timing waveform acquisition
20 GHz bandwidth with 10ps resolution
Probe n-FET, p-FET device types
Verified on 22 nm minimum sized nodes
PDP probing with reduced laser power
Test loop constraints relaxed; input clock flexibility
High resolution IR imaging with Solid Immersion Lens (SIL) and Laser Scanning Microscope (LSM)
ATE docking capability enables at-speed device probing

Easy-to-use software control based upon the EmiScope user interface
Compatible with NEXS Software Suite of navigation tools
High power Spray Cooling thermal management system
Qualified clock acquisition scheme for jitter mitigation
Full compatiblity with the NEXS Software Suite of navigation tools, allowing fast and easy generation of CAD navigation data that is formatted for the device analyst

Ruby combines the best aspects of time-resolved emission (TRE) with laser voltage probing (LVP). This innovative PDP-based prober improves upon legacy LVP systems in terms of key performance specifications such as: measurement bandwidth, ability to measure lower voltage levels, ability to probe both n- and p-FET device types, data represented as voltage-like waveforms, and minimal invasiveness through a reduction in required laser power. Ruby is capable of probing bulk and SOI CMOS devices. Ruby features key productivity advantages from the TRE system, such as: simple test loop setup and constraints, and industry-leading sensitivity and spatial resolution via the integration of DCG Systems' point-and-click Solid Immersion Lens (SIL) technology.
	Ruby incorporates a patented "Point-and-Click" Solid Immersion Lens (SIL) for superior imaging and signal quality with unmatched ease of use. The fully integrated SIL is designed for ultra-high resolution IR imaging and efficient signal acquisition, with true point-and-click usability. The 2.45NA SIL makes direct contact with the silicon substrate, maximizing the signal transmission and image clarity through the back-side silicon. The combination of optional patented spray cooling technology with the SIL makes Ruby the best-in-class solution for precision waveform acquisition on high-power devices.
The infrared probe laser yields significant improvements over previous generations of laser voltage probers. Ruby's new high bandwidth mode-locked laser (MLL) has a large tuning range and is highly stable. The 1064 nm laser is passively mode-locked with automatic cavity length adjustment to allow for a very short, low-noise laser pulse generation of less than 10ps. The innovative "dual-laser" noise reduction scheme employs an additional diode laser source to sample noise within the test pattern, allowing Ruby to remove low-frequency noise components and improve overall SNR. Improved spectral matching of the lasers enables a noise floor reduction of greater than two times previous implementations, thus accelerating waveform acquisition times by a factor of four.
	Ruby system control is based upon the mature EmiScope graphical user interface, providing analysts with an easy-to-use, familiar environment. Flexible tester synchronization and a single interferometer control parameter are among the simplified setup options available to the user. Precise timing measurements are possible with a 10ps timing resolution and a bandwidth of greater than 15GHz.

Options

Laser Voltage Imaging

Laser Voltage Imaging (LVI), enables the EmiScope and Ruby to show the physical locations of transistors that are active at a specific frequency.

CW Laser Voltage Probing

Continuous Wave Laser Voltage Probing (CW-LVP) acquires functional waveform data on the EmiScope.

NEXS Software for Circuit Analysis

NEXS provides CAD navigation for the physical device, and cross-maps physical locations to the circuit schematic. Optional NEXS Layout configurations read either GDS or Knights mask database formats.

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