Ruby
The next generation in back-side laser voltage probing
Fast and clean acquisition of sub-volt waveforms is critical in the performance of a timely analysis. The Ruby laser voltage prober is a dynamic waveform acquisition and analysis instrument which provides leading-edge analytical capability for sub-volt devices. Utilizing a focused infrared laser and solid immersion lens (SIL), Ruby can probe through the silicon device substrate and measure waveforms from active device transistors on flip-chip devices. The Ruby is built upon the mature , reliable EmiScope architecture and leverages a new laser voltage probing acquisition scheme Polarization Difference Probing (PDP). Ruby couples ease-of-use with unprecedented low-voltage sensitivity and waveform timing accuracy.
- Node-level timing waveform acquisition
- 15 GHz bandwidth with 10ps resolution
- Probe n-FET, p-FET device types
- Verified on 45 nm minimum sized nodes at Vdd=600mV
- PDP probing with reduced laser power
- Test loop constraints relaxed; input clock flexibility
- High resolution IR imaging with Solid Immersion Lens (SIL) and Laser Scanning Microscope (LSM)
- ATE docking capability enables at-speed device probing
- Easy-to-use software control based upon the EmiScope user interface
- Compatible with NEXS Software Suite of navigation tools
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Waveforms...
Ruby combines the best aspects of time-resolved emission (TRE) with laser voltage probing (LVP). This innovative PDP-based prober improves upon legacy LVP systems in terms of key performance specifications such as: measurement bandwidth, ability to measure lower voltage levels, ability to probe both n- and p-FET device types, data represented as voltage-like waveforms, and minimal invasiveness through a reduction in required laser power. In addition, Ruby features key productivity advantages from the TRE system, such as: simple test loop setup and constraints, and industry-leading sensitivity and spatial resolution via the integration of DCG Systems' point-and-click Solid Immersion Lens (SIL) technology.
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Ruby incorporates a patented "Point-and-Click" Solid Immersion Lens (SIL) for superior imaging and signal quality with unmatched ease of use. The fully integrated SIL is designed for ultra-high resolution IR imaging and efficient signal acquisition, with true point-and-click usability. The 2.45NA SIL makes direct contact with the silicon substrate, maximizing the signal transmission and image clarity through the back-side silicon.
The combination of optional patented spray cooling technology with the SIL makes Ruby the best-in-class solution for precision waveform acquisition on high-power devices. |
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The infrared probe laser yields significant improvements over previous generations of laser voltage probers. Ruby's new high bandwidth mode-locked laser (MLL) has a large tuning range and is highly stable. The 1064 nm laser is passively mode-locked with automatic cavity length adjustment to allow for a very short, low-noise laser pulse generation of less than 10ps.
The innovative "dual-laser" noise reduction scheme employs an additional diode laser source to sample noise within the test pattern, allowing Ruby to remove low-frequency noise components and improve overall SNR.
Improved spectral matching of the lasers enables a noise floor reduction of greater than two times previous implementations, thus accelerating waveform acquisition times by a factor of four. |
Easy to use...
Ruby system control is based upon the mature EmiScope graphical user interface, providing analysts with an easy-to-use, familiar environment. Flexible tester synchronization and a single interferometer control parameter are among the simplified setup options available to the user. |
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Precision measurements...
Precise timing measurements are possible with a 10ps timing resolution and a bandwidth of greater than 15GHz. |
Options
- High power Spray Cooling thermal management system
- Qualified clock acquisition scheme for jitter mitigation
- Full compatiblity with the NEXS Software Suite of navigation tools, allowing fast and easy generation of CAD navigation data that is formatted for the device analyst.
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